微波ECR等离子体,Microwave ECR plasma
1)Microwave ECR plasma微波ECR等离子体
1.This system is applied to the measurement of microwave ECR plasma inner parameters and proved to work well.将该系统应用于微波ECR等离子体参数的测定,经实验测试效果较好。
2.With these advantages,Microwave ECR plasma finds number of applications in the areas of etching technologies, thin film deposition and plasma source.微波ECR等离子体还具有无内极放电和放电离子低溅射率的优点,正是由于这些优点,使其在刻蚀技术、薄膜制备技术和离子源等方面得到了广泛应用。
2)Microwave-ECR Plasma微波ECR等离子体
3)ECR microwave plasmaECR微波等离子体
1.Monte Carlo method is used to simulate such a complete course, in which the ions pass through the neutral region, the sheath, and the shield region of a virtual cathode formed by secondary electrons near the workpiece surface, finally come to be absorbed by the surface of the workpiece with negative bias inECR microwave plasma.建立了ECR微波等离子体源离子输运的平板和圆柱模型 ,对离子历经的空间区域的输运过程进行了数值研究 。
4)MW-ECR plasma微波-ECR等离子体
英文短句/例句
1.MW-ECR Plasma Enhanced Unbalance Magnetron Sputtering and Carbon Nitride Films Preparation;微波-ECR等离子体增强非平衡磁控溅射技术及CN薄膜的制备研究
2.Study on ECR Hydrogen Plasma Treatment of SiC Surface;SiC表面ECR氢等离子体处理研究
3.Study on ECR Hydrogen Plasma Treatment of N-type 4H-SiCN型4H-SiC ECR氢等离子体处理研究
4.Investigation on ECR Plasma Deposition and Dielectric Property of SiCOH Low-k Films;SiCOH低k薄膜的ECR等离子体沉积与介电性能研究
5.Spectroscopic Study on the Interactions between Pulsed-Laser-ablation-produced Plasma and ECR Plasma脉冲激光烧蚀等离子体和ECR放电等离子体相互作用的光谱研究
6.Investigation on Low-κ SiCOH Films Prepared by ECR-CVD and the Influence of Fluorine Incorporation;SiCOH低κ薄膜的ECR等离子体制备及F掺杂效应研究
7.The Characteristic of ECR Plasma and Its Application in Deposition of GaN Thin Film;ECR等离子体参数空间分布特性研究及制备GaN薄膜中的应用
8.Numerical Simulation on Microwave Electron Cyclotron Resonance Plasma;微波电子回旋共振等离子体数值模拟
9.ion plasma wave and ionic plasma oscillation离子等离子体波和离子等离子体振荡
10.capacitively coupled microwave plasma torch电容耦合微波等离子体焰炬
11.inductively coupled microwave plasma torch电感耦合微波等离子体焰炬
12.microwave plasma emission spectroscopic detector微波等离子体发射光谱检测器
13.The Research of Making C_2 Hydrocarbon by Coupling Methane Using Microwave Plasma;微波等离子体偶联甲烷制C2烃的研究
14.Studies on Treatment of Environmental Pollutants with Microwave Plasma;微波等离子体处理环境污染物的研究
15.Investigation on the Microwave Reflection Characteristics of Large Area Plasma Sheet大面积等离子体片微波反射特性研究
16.Simulation of microwave plasma thruster flow微波等离子体推力器流动模拟(英文)
17.Experimental Results of the Impact of an Ion Thruster Plasma on Microwave Propagation离子推进等离子体与微波传播碰撞的实验结果
18.Production and Characteristics of Plasma Based on Surface Microwave微波表面波等离子体的产生与特性研究
相关短句/例句
Microwave-ECR Plasma微波ECR等离子体
3)ECR microwave plasmaECR微波等离子体
1.Monte Carlo method is used to simulate such a complete course, in which the ions pass through the neutral region, the sheath, and the shield region of a virtual cathode formed by secondary electrons near the workpiece surface, finally come to be absorbed by the surface of the workpiece with negative bias inECR microwave plasma.建立了ECR微波等离子体源离子输运的平板和圆柱模型 ,对离子历经的空间区域的输运过程进行了数值研究 。
4)MW-ECR plasma微波-ECR等离子体
5)MW-ECR Plasma Source微波-ECR等离子体源
6)MWPECR微波等离子体ECR技术
延伸阅读
电感耦合微波等离子体焰炬分子式：CAS号：性质：由微波感生、用于发射光谱分析的等离子体光源。将发生等离子体焰炬的石英管，置于微波谐振腔中，以2450MHz的微波激发。产生的光谱简单，背景低，耗气与耗电量小。
